密封器件氣密性檢測(cè)是一項(xiàng)重要的安全檢測(cè)之一, 這里采用微差壓原理, 利用高精度差壓傳感器、精密對(duì)稱氣路和單片機(jī)測(cè)控系統(tǒng)組成測(cè)試裝置, 實(shí)現(xiàn)了對(duì)一定容積和壓力下密封器件氣密性的高精度檢測(cè)。介紹了該檢測(cè)儀的工作原理、硬件軟件結(jié)構(gòu)和系統(tǒng)性能。
關(guān)鍵詞　微差壓原理　高精度　傳感器　氣體泄漏檢測(cè)儀
Abstract　A irp roof component airt igh t detect ion is one of impo rtant safety detect ions. In th is paper, the device is int roduced,wh ich compo sed of h igh2p recision m icro different ial p ressure senso r, rigid symmet ry air p ipe loop and m icroch ip system by using m icro different ial p ressure p rincip le, realizing airp roof component’s h igh2p recision airp roof detect ion under certain p ressure and cubage. The p rincip le, the hardware and software const ruct ion and it s perfo rmance are discussed.
Key words　M icro different ial p ressure p rincip le　H igh p recision　Senso r　A ir2leakage detecto r