現(xiàn)代檢測(cè)與補(bǔ)償技術(shù)越來(lái)越要求測(cè)量的高精度和實(shí)時(shí)性, 通過(guò)直接獲取運(yùn)動(dòng)誤差以避免
誤差殘留的二次相移三點(diǎn)法, 為運(yùn)動(dòng)誤差的在線高精度檢測(cè)提供了一條有效途徑. 通過(guò)對(duì)3 個(gè)傳感器的測(cè)量數(shù)據(jù)按照二次相移原則進(jìn)行數(shù)據(jù)重組, 在數(shù)據(jù)處理的首次操作時(shí)消除直線形狀誤差的影響, 從而在反濾波基礎(chǔ)上可以先行分離出直行運(yùn)動(dòng)誤差的平移分量和轉(zhuǎn)動(dòng)分量. 利用權(quán)函數(shù)對(duì)比分析, 證明了二次相移三點(diǎn)法與先行分離形狀誤差的直線頻域三點(diǎn)法在本質(zhì)上的同源性和統(tǒng)一性. 實(shí)驗(yàn)結(jié)果表明, 該方法可以較好地分離出直行運(yùn)動(dòng)誤差和直線形狀誤差.
關(guān)鍵詞: 二次相移三點(diǎn)法; 誤差分離技術(shù); 映射矩陣; 反濾波; 直行運(yùn)動(dòng)誤差
Abs tra c t: To imp lem en t h igh2p recision and on2linem easu rem en t of linearmo t ion erro rs, a novel erro r sep2 arat ion techn ique (EST ) m ethod nam ed quadrat ic phase sh if t th ree2po in t m ethod w as p ropo sed, w h ich is based on the data recon st ruct ion and inverse f iltering. A cco rding to the p rincip le of quadrat ic phase sh if t, the data f rom th ree p robes are recon st ructed, and the inf luence of fo rm erro r can be elim inated, so the lin2 ear erro r mo t ion can be separated and gained f irst ly on the basis of inverse f iltering. Comparat ive analysis of the w eigh t ing funct ion p roves the homo logy and un itarity betw een the common f requency th ree2po in t m ethod and the p ropo sed m ethod. Sat isfacto ry effect s w ere ach ieved by som e experim en t s.

Ke y w o rds: quadrat ic phase sh if t th ree2po in t m ethod; erro r separat ion techn iques (EST ) ; m app ing m a2 t rix; inverse f iltering; linear mo t ion erro r