提出一種計(jì)算加速度計(jì)靈敏度和頻率的改進(jìn)方法。該方法在計(jì)算微結(jié)構(gòu)的靈敏度和頻率時(shí)考慮質(zhì)量塊的變形及梁的質(zhì)量。得到的結(jié)果表明,當(dāng)梁與質(zhì)量塊的厚度比變得較大時(shí),的上表面的最大拉應(yīng)力值不再等于最大壓應(yīng)力值。該方法計(jì)算得到的頻率和忽略質(zhì)量塊變形與梁質(zhì)量所得到的頻率與ANSYS 模擬相比,偏差由90 %下降到15 %。最后進(jìn)行了靜態(tài)測(cè)試,結(jié)果與改進(jìn)模型基本相符。
關(guān)鍵詞　靜態(tài)測(cè)試　加速度傳感器　微電子機(jī)械系統(tǒng)　靈敏度　頻率
Abstract 　Presented here is an improved method for the sensitivity and frequency analysis. In this analysis , the effects that the mass of beam and the deformation of the mass have on the performance of the accelerometer have been taken into account. Results show that the maximal extension stress in the beam is not equal to the maximal compression stress when the thickness ratio of the beam is no longer much lower than the proof mass’s. The frequency error between ANSYS’s value and the simplified analysis’s value is near 90 % , while the frequency error can drop to 15 % in the method presented here. At the end ,the static test is described. The results are in good agreement with the improved model that we put forward.
Key words 　Static test ; Accelerometer ; Micro2electro2mechanical system; Sensitivity ;Frequency